Person
Prof. Dr. Markus Bender
Vita
- since 2022: Deputy director of the Institute for Micro Technologies (IMtech) at Hochschule RheinMain university of applied sciences
- since 2020: Professor for Micro- und Nanotechnologies at Hochschule RheinMain university of applied sciences
- since 2009: Staff scientist in materials research (MAT) at GSI Helmholtzcenter for Heavy Ion Research, Darmstadt
- 2008 - 2009: Staff scientist at LMU Munich, AG Habs
- 2008: PhD in Physics, Goethe-University Frankfurt, atomic physics (Prof. Dr. Reinhard Dörner) “Untersuchung der Ionenstrahl-induzierten Desorption an Beschleuniger-relevanten Materialien” → “Investigation of ion-induced desorption on accelerator-relevant materials”
- 2003: Dipl. Ing. (FH) in physics engineering, Hochschule RheinMain university of applied sciences
- 2000 - 2003 Studies on physical engineering, Hochschule RheinMain university of applied sciences
- 1995 - 1999 Apprenticeship radio and television technology
Teaching
- Introduction into Solid State Physics (Bachelor Applied Physics):
- Chemical bonds: from atoms to solids
- Crystal structures and X-ray diffraction
- Reciprocal lattice
- Phonon oscillations and specific heat of the lattice
- Electrons and specific heat of the electronic subsystem
Crystal defects: the real world
- Laboratory course on Vacuum Technology (Bachelor Applied Physics and Bachelor Interdisciplinary Engineering):
- Vacuum technology fundamentals
- Kinetic gas theory
- Ideal Gasses: equation of states
- Generating and measuring vacuum
- Applications
- Laboratory experiments:
- Determining the pumping speed of different vacuum pumps
- Using a mass spectrometer
- permeation of gas through a hostaphane foil
- Deposition of thin metallic films and size effect
Generating plasma
- Mechanical Assembly Parts (Bachelor Interdisciplinary Engineering and Bachelor Applied Physics)
- The choice of assembly parts in an construction process
- Design of non-standard assembly parts
- Strength of materials (strain, tension, stress, buckling, tongue)
- Surface and Thin Film Physics (Master Applied Physics)
- Application of thin films
- Surface reconstructions, surface tension, Eötvös rule
- Deposition of thin films
- Analytics on thing films
- Hot topics (e.g. nanotechnology, 2D-layers)
Physics of the Electrical and Optical Properties of Materials (Master Applied Physics)
- Theory of electrical conductivity of metals
- The origin of band structures
- Dynamics of charge carriers in bands
- p-n-transition
- Components of semiconductor electronics (transistors, FETs, LEDs, photo diodes, PV-cells)
Research and projects
- Funded Projects
- BMBF / BMFTR FH-Kooperativ: “MINIMISE - Micro-Nano-Interfacing für MEMS-integrated Sensors” (since 03/2025): Attach nano structures as sensor elements to the macroscopic world. Integration of selected nano structures (nano wires, fs-hSi, heat conductivity sensor) in dedicated micro structures. These micro structures will be connected to the macro world by standard assembly and packaging. Electron beam lithography and electron-induced deposition and etching. (Link upcoming)
- HMWK LOEWE 3-KMU: "KPM - Entwicklung und Integration von kleinen und präzisen MEMS-Mikrosensoren für selektive Wasserstoffmessung" → “Development and integration of small, precise MEMS-microsensors for selective Hydrogen detection” (04/2022 - 04/2023): Selective Hydrogen measurement by thermal conductivity detectors (TCD) (Link upcoming)
- HMWK Forschung für die Praxis: “SorpTrap - Metallschäume für Sorptionsfallen zur Gasreinigung” → “Metal foams as sorption traps for gas purification” (04/2021 - 04/2022): Are cooled metallic foam materials able to clean and dry gasses similar to ceolith traps and will there be a USP / a market position? (Link upcoming)
- Deposition of CVD diamonds. The aim is to implant NV centers as Quantum Dots and to integrate these NV-doped diamonds into micro- and nano-systems
- Manufacture of microelectronic components (presently p-n-transitions) at IMtech
- Optimizing vacuum surfaces to reduce stimulated gas desorption
in preparation
- Paper on Swift Heavy Ion Irradiation of Bi Nanowires
2025
- C.-C. Meyer, E. Artes, M. Bender, J. Brötz, Ch. E. Düllmann, et al., Microscopic and spectroscopic analysis of ion-irradiated molecular-plated thin films for superheavy element production, Nucl. Instr. Meth. A 1075 (2025) 170361, DOI: 10.1016/j.nima.2025.170361
2023
L. Kirsch, W. Assmann, S. Gerlach, A.-K. Schmidt, M. Bender, et al., Ionoacoustic monitoring of relativistic heavy ion beams, Nucl. Instr. Meth. A 1057 (2023) 168755, DOI: 10.1016/j.nima.2023.168755
Carl-Christian Meyer, Ernst Artes, Markus Bender, Joachim Brötz, Christoph E. Düllmann, Constantin Haese, Egon Jäger, Birgit Kindler, Bettina Lommel, Marton Major, Maximilian Rapps, Dennis Renisch, Christina Trautmann und Alexander Yakushev, Fabrication, swift heavy ion irradiation, and damage analysis of lanthanide targets, Radiochimica Acta 2023, DOI: 10.1515/ract-2023-0197
V. Velthaus, C. Trautmann, M. Bender, Mitigation of ion-induced desorption for accelerator components by surface treatment and annealing, Vacuum 211 (2023), 111965, doi.org/10.1016/j.vacuum.2023.111965
C. Mejía, G. S. V. Muniz, M. Bender, D. Severin, C. Trautmann, A. N. Agnihotri, B. Augé, A. Domaracka, P. Boduch, H. Rothard, Swift heavy ion irradiation of Thymine at cryogenic temperature, Nucl. Instum. Meth. B534 (2023) 11-15, doi: 10.1016/j.nimb.2022.10.024
2022
E. Dartois, M. Chabot, F. Koch, C. Bachelet, M. Bender, J. Bourçois, J. Duprat, J. Frereux, M. Godard, S. Hervé2, B. Merk, T. Pino, J. Rojas, I. Schubert, and C. Trautmann, Desorption of polycyclic aromatic hydrocarbons by cosmic rays Implications for PAH inventories under TMC-1 dense cloud conditions, Astronomy & Astrophysics 663, A25 (2022) 1-8, DOI: 10.1051/0004-6361/202243274
P. Schneider, P. Keller, I. Schubert, M. Bender, C. Trautmann & M. Dürr, Bond‑specific fragmentation of oligopeptides via electronic stopping of swift heavy ions in molecular films, Scientific Reports 12 (2022) 17975, DOI: 10.1038/s41598-022-21744-w
2021
M. Ferry, S. Esnouf, F. Leprêtre, C. Cabet, M. Bender, D. Severin, E. Balanzat, Y. Ngono, Effect of oxygen on gas emitted from polymer irradiated using Swift Heavy Ion beams, Nucl. Instr. Meth B 497 51-58, doi: 10.1016/j.nimb.2021.04.006
V. Velthaus, B. Tietz, C. Trautmann, F. Völklein, M. Bender, Desorption measurements of accelerator-related materials exposed to different stimuli, Vacuum 194 (2021) 110608, doi: 10.1016/j.vacuum.2021.110608
- C. Länger, P. Ernst, M. Bender, D. Severin, C. Trautmann, M. Schleberger, M. Dürr, Single-ion induced surface modifications on hydrogen-covered Si(001) surfaces - significant difference between slow highly charges and swift heavy ions, New Journal of Physics 23 (2021) 093037, doi: 10.1088/1367-2630/ac254d
2020
M. Toulemonde, W. Assmann, B. Ban-d’Etat, M. Bender, A. Bergmaier, P. Boduch, S. Della Negra, J. Duan, A. S. El-Said, F. Grüner, J. Liu, D. Leli‘evre, H. Rothard, T. Seidl, D. Severin, J. P. Stoquert, K.-O. Voss, C. Trautmann, Sputtering of LiF and other halide crystals in the electronic energy loss regime, The European Physical Journal D 74 (2020) 144, doi: 10.1140/epjd/e2020-10040-9
- S. Lehrack, W. Assmann, M. Bender, D. Severin, C. Trautmann, J. Schreiber, K. Parodi, Ionoacoustic detection of swift heavy ions, Nucl. Instr. Meth. A 950 (2020) 162935, doi: doi.org/10.1016/j.nima.2019.162935
2019
M. Herder, L. Breuer, M. Bender, D. Severin, A. Wucher, Ionization probability of sputtered coronene molecules, Nucl. Instr. Meth. B 460, (2019) 193-200, doi: 10.1016/j.nimb.2019.05.008
T. Pino, M. Chabot, K. Béroff, M. Godard, F. Fernandez-Villoria, K. C. Le, L. Breuer, M. Herder, A. Wucher, M. Bender, D. Severin, C. Trautmann, E. Dartois, Release of large polycyclic aromatic hydrocarbons and fullerenes by cosmic rays from interstellar dust, Astronomy & Astrophysics 623 A134 (2019) doi: 10.1051/0004-6361/201834855
- M. Bender, Pressure instabilities in heavy ion accelerators in O. B. Malyshev (ed.) Vacuum in accelerators, Wiley-VCH (2019), ISBN: 978-3-527-34302-7
2018
M. Herder, P. Ernst, L. Breuer, M. Bender, D. Severin, A. Wucher, Secondary ion formation on indium under nuclear and electronic sputtering conditions, J. Vac. Sci. Technol. B 36-3 (2018) 03F110, doi: 10.1116/1.5018721
L. Breuer, P. Ernst, M. Herder, F. Meinerzhagen, M. Bender, D. Severin, A. Wucher, Secondary ion formation during electronic and nuclear sputtering of Germanium, Nucl. Instr. Meth. B 424 (2018) 1-9, doi: 10.1016/j.nimb.2018.03.019
- L. Breuer, P. Ernst, M. Herder, F. Meinerzhagen, M. Bender, D. Severin, A. Wucher, metric investigation of material sputtered under swift heavy ion bombardment, Nucl. Instr. Meth. B 435 (2018) 101-110, doi: 10.1016/j.nimb.2017.10.019
2017
E. Dartois, M. Chabot, T. Pino, K. Béroff, M. Godard, D. Severin, M. Bender, C. Trautmann, Swift heavy ion irradiation of interstellar dust analogues. Small carbonaceous species released by cosmic rays, Astronomy & Astrophysics 599, A130 (2017) doi: 10.1051/0004-6361/201629646
- W. Assmann, B. Ban-d’Etat, M. Bender, P. Boduch, P. L. Grande, H. Lebius, D. Lelièvre, G. G. Marmitt, H. Rothard, T. Seidl, D. Severin, K.-O. Voss, M. Toulemonde, C. Trautmann, Charge-state related effects in sputtering of LiF by swift heavy ions, Nucl. Instr. Meth. B 392 (2017) 94-101, doi: 10.1016/j.nimb.2016.12.013
2016
L. Breuer, F. Meinerzhagen, M. Herder, M. Bender, D. Severin, J. O. Lerach, A. Wucher, Secondary ion and neutral mass spectrometry with swift heavy ions: Organic molecules, J. Vac. Sci. Technol. B 34 (2016) 03H130, doi: 10.1116/1.4943158
F. Meinerzhagen, L. Breuer, H. Bukowska, M. Bender, D. Severin, M. Herder, H. Lebius, M. Schleberger, A. Wucher, A new setup for the investigation of swift heavy ion induced particle emission and surface modifications, Rev. Sci. Instr. 87 (2016) 013903, doi: 10.1063/1.4939899
S. Gupta, H. G. Gehrke, J. Krauser, C. Trautmann, D. Severin, M. Bender, H. Rothard, H. Hofsäss, Conducting ion tracks generated by charge-selected swift heavy ions, Nucl. Instr. Meth. B 381 (2016) 76-83, doi: 10.1016/j.nimb.2016.05.010
- C. L. Tracy, M. Lang, D. Severin, M. Bender, C. Trautmann, R. C. Ewing, Anisotropic expansion and amorphization of Ga2O3 irradiated with 946 MeV Au ions, Nucl. Instr. Meth. B 374 (2016) 40-44, doi: 10.1016/j.nimb.2015.08.059
2015
M. Lang, C. L. Tracy, R. I. Palomares, F. Zhang, D. Severin, M. Bender, C. Trautmann, C. Park, V. B. Prakapenka, V. A. Skuratov, R. C. Ewing, Characterization of ion-induced radiation effects in nuclear materials using synchrotron x-ray techniques, J. Materials Research 30 (09) (2015) 1366-1379, doi: 10.1557/jmr.2015.6
C. Hubert, K.-O. Voss, M. Bender, K. Kupka, A. Romanenko, D. Severin, C. Trautmann, M. Tomut, Swift heavy ion-induced radiation damage in isotropic graphite studied by micro-indentation and in-situ electrical resistivity, Nucl. Instr. Meth. B 365 (2015) 509-514, doi: 10.1016/j.nimb.2015.08.056
C. L. Tracy, M. Lang, J. M. Pray, F. Zhang, D. Popov, C. Park, C. Trautmann, M. Bender, D. Severin, V. A. Skuratov, R. C. Ewing, Redox response of actinide materials to highly-ionizing radiation, Nature Communications 6 (2015) 6133, doi: 10.1038/ncomms7133
F. Pellemoine, M. Avilov, M. Bender, R. C. Ewing, S. Fernandes, M. Lang, W. X. Li, W. Mittig, M. Schein, D. Severin, M. Tomut, C. Trautmann, F. X. Zhang, Study on structural recovery of graphite irradiated with swift heavy ions at high temperature, Nucl. Instr. Meth. B 365 (2015) 522-524, doi: 10.1016/j.nimb.2015.09.007
C. Mejía, M. Bender, D. Severin, C. Trautmann, Ph. Boduch, V. Bordalo, A. Domaracka, X. Y. Lv, R. Martinez, H. Rothard, Radiolysis and sputtering of carbon dioxide ice induced by swift Ti, Ni and Xe ions, Nucl. Instr. Meth. B 365 (2015) 477-481, doi: 10.1016/j.nimb.2015.09.039
L. Breuer, F. Meinerzhagen, M. Bender, D. Severin, A. Wucher, Time-of-flight secondary neutral & ion mass spectrometry using swift heavy ions, Nucl. Instr. Meth. B 365 (2015) 482-489, doi: 10.1016/j.nimb.2015.07.117
- M. Bender, D. Severin, M. Tomut, C. Trautmann, Material-related issues at high-power and high-energy ion beam facilities, J. Phys.: Conference Series 599 (2015) 012039, doi: 10.1088/1742-6596/599/1/012039
2014
M. Lang, M. Toulemonde, J. Zhang, F. Zhang, C. L. Tracy, J. Lian, Z. Wang, W. J. Weber, D. Severin, M. Bender, C. Trautmann, R. C. Ewing, Swift heavy ion track formation in Gd2Zr2−xTixO7 pyrochlore: effect of electronic energy loss, Nucl. Instr. Meth. B 336 (2014) 102-115, doi: 10.1016/j.nimb.2014.06.019
- U. H. Hossain, V. Lima, O. Baake, D. Severin, M. Bender, W. Ensinger, On-line and post irradiation analysis of swift heavy ion induced modification of PMMA (polymethyl-methacrylate), Nucl. Instr. Meth. B 326 (2014) 135-139, doi: 10.1016/j.nimb.2013.10.074
2013
S. Fernandes, F. Pellemoine, M. Tomut, M. Avilov, M. Bender, M. Boulesteix, M. Krause, W. Mittig, M. Schein, D. Severin, C. Trautmann, In-situ electric resistance measurements and annealing effects of graphite exposed to swift heavy ions, Nucl. Instr. Meth. B 314 (2013) 125-129, doi: 10.1016/j.nimb.2013.04.060
D. P. Holzer, E. Mahner, H. Kollmus, M. Bender, D. Severin, M. Wengenroth, Heavy-ion-induced desorption yields of cryogenic surfaces bombarded with 1.4 MeV/u xenon ions, Phys. Rev. ST Accel. Beams 169 (2013) 083201, doi: 10.1103/PhysRevSTAB.16.083201
W. Li, M. D. Rodriguez, P. Kluth, M. Lang, N. Medvedev, M. Sorokin, J. Zhang, B. Afra, M. Bender, D. Severin, C. Trautmann, R. C. Ewing, Effect of doping on the radiation response of conductive Nb-SrTiO3, Nucl. Instr. Meth. B 302 (2013) 40-47, doi: 10.1016/j.nimb.2013.03.010
Ochedowski, K. Marinov, G. Wilbs, G. Keller, N. Scheuschner, D. Severin, M. Bender, J. Maultzsch, F. J. Tegude, M. Schleberger, Radiation hardness of graphene and MoS2 field effect devices against swift heavy ion irradiation, J. Appl. Phys. 113 (2013) 214306, doi: 10.1063/1.4808460
- D. Schauries, M. Lang, O. H. Pakarinen, S. Botis, B. Afra, M. D. Rodriguez, F. Djurabekova, K. Nordlund, D. Severin, M. Bender, W. X. Li, C. Trautmann, R. C. Ewing, N. Kirby, P. Kluth, Temperature dependence of ion track formation in quartz and apatite, J. Appl. Crystallography 46 (2013) 1-6, doi: 10.1107/S0021889813022802
2012
T. Seidl, O. Baake, U. H. Hossain, M. Bender, D. Severin, C. Trautmann, W. Ensinger, In-situ investigation of polyvinyl formal irradiated with GeV Au ions, Nucl. Instr. Meth. B 272 (2012) 400-404, doi: 10.1016/j.nimb.2011.01.110
- M. Lang, F. Zhang, W. Li, D. Severin, M. Bender, S. Klaumünzer, C. Trautmann, R. C. Ewing, Swift heavy ion-induced amorphization of CaZrO3 perovskite, Nucl. Instr. Meth. B 286 (2012) 271-276, doi: 10.1016/j.nimb.2011.12.028
2011
E. Mahner, L. Evans, D. Küchler, R. Scrivens, M. Bender, H. Kollmus, D. Severin, M. Wengenroth, Heavy-ion induced desorption yields of cryogenic surfaces bombarded with 4.2 MeV/u lead ions, Phys. Rev. ST Accel. Beams 14 (2011) 050102, doi: 0.1103/PhysRevSTAB.14.050102
- O. Baake, T. Seidl, U. H. Hossain, A. O. Delgado, M. Bender, D. Severin, W. Ensinger, An apparatus for in situ spectroscopy of radiation damage of polymers by bombardment with high-energy heavy ions, Rev. Sci. Instr. 82 (2011) 045103, doi: 10.1063/1.3571301
2010
M. Bender, H. Kollmus, M. C. Bellachioma, W. Assmann, UHV-ERDA investigations of NEG coatings, Nucl. Instr. Meth. B 268 (2010) 1986-1990, doi: 10.1016/j.nimb.2010.02.114
- O. B. Malyshev, B. Zajec, A. Haase, L. Westerberg, M. Leandersson, M. Bender, A. Krämer, H. Kollmus, H. Reich-Sprenger, Ar beam induced desorption from different materials at TSL, Vacuum 85 (2010) 338-343, doi: 10.1016/j.vacuum.2010.07.007
2009
E. Hedlund, L. Westerberg, O. B. Malyshev, E. Edqvist, M. Leandersson, H. Kollmus, M. C. Bellachioma, M. Bender, A. Krämer, H. Reich-Sprenger, B. Zajec, A. Krasnov, Ar ion induced desorption yields at the energies 5–17.7 MeV/u, Nucl. Instr. Meth. A 599 (2009) 1-8, doi: 10.1016/j.nima.2008.09.052
E. Hedlund, O. B. Malyshev, L. Westerberg, A. Krasnov, A. S. Semenov, M. Leandersson, B. Zajec, H. Kollmus, M. C. Bellachioma, M. Bender, A. Krämer, H. Reich-Sprenger, Heavy-ion induced desorption of a TiZrV coated vacuum chamber bombarded with 5 MeV/u Ar8+ beam at grazing incidence, J. Vac. Sci. Technol. A 27 (2009) 139-144, doi: 10.1116/1.3032914
- M. Bender, H. Kollmus, H. Reich-Sprenger, M. Toulemonde, W. Assmann, An inelastic thermal spike model to calculate ion induced desorption yields, Nucl. Instr. Meth. B 267 (2009) 885-890, doi: 10.1016/j.nimb.2009.02.039
2008
H. Kollmus, M. Bender, W. Assmann, A. Krämer, M. C. Bellachioma, H. Reich-Sprenger, Heavy ion-induced desorption investigations using UHV-ERDA, Vacuum 82 (2008) 402-407, doi: 10.1016/j.vacuum.2007.07.062
- M. C. Bellachioma, J. Kurdal, M. Bender, H. Kollmus, A. Krämer, H. Reich-Sprenger, Thin film getter coatings for the GSI heavy-ion synchrotron upgrade, Vacuum 82 (2008) 435-439, doi: 10.1016/j.vacuum.2007.07.050
2007
M. Bender, H. Kollmus, W. Assmann, Desorption yields of differently treated copper samples characterized with ERDA, Nucl. Instr. Meth. B 256 (2007) 387-391, doi: 10.1016/j.nimb.2006.12.101
- A. W. Molvik, H. Kollmus, E. Mahner, M. Kireeff Covo, M. C. Bellachioma, M. Bender, F. M. Bieniosek, E. Hedlund, A. Krämer, J. Kwan, O. B. Malyshev, L. Prost, P. A. Seidl, G. Westenskow, L. Westerberg, Heavy-ion-induced electronic desorption of gas from metal, Phys. Rev. Lett. 98 (2007) 064801uj, doi: 10.1103/PHYSREVLETT.98.064801
- Raith Electron Beam Lithography with ebie and nano manipulation (since 04/2026)
- Jeol JSM-6380LV Scanning Electron Microscope with Low-Vacuum-Option and Ametek Octane Elect EDX
- Balzers Magnetron-Sputter Coater for thin films (3 Targets, 3'')
- Pink Magnetron-Sputter Coater with IBE for thin films (3 Targets, 6'') (presently in revision)
- Higg Frequency (AC)-Sputter Coater for dielectric films (SiO2)
- Satis Elektron Beam Evaporator (1 crucible)
- HVD Thermal Evaporator (1 crucible)
- BENEQ R2 Atomic Layer Deposition for AL2O3 and Si3N4
- Ion Beam Etcher (IBE) with 4'' Kaufmann Source
- Oxford Instruments PlasmaPro 100 Cobra ICP-Etcher
- RIE / ICP
- Desorption Rate Measuring (own assembly)
- Hollow cathode Ion Source max. 5 keV (own assembly)
- Specs IQE 11 hot cathode Ion Source
- Several vacuum setups for common use (to 1e-9 mbar)
- Omicron AFM-1 UHV AFM/STM-System (presently in revision)
- AFM Digital Instruments CPII Atomic Force Microscope
- Several Optical Microscopes, e.g., Keyence VHX
- Bruker Dektak Pro Profilometer
- Precitec CHROCODIL Profilometer (chromatic, confocal)
- Suss MJB21 two sided Mask Aligner (4'')
- Heidelberg Instruments µPG 101 Laser-Direct Writing System
- Cleanroom ISO-Class 3
- Wet Chemistry Area with ultra-pure water, supersonification, spin coater
- Acretech SS11 Wafer Dicer
- TPT BH05 Wire Bonder
Committees and memberships
- Member of DFG Fachkollegium 4.31 (Materials Engineering), 4.31-03: Thin film deposition and surface technologies
- Member of Committee Research with nuclear probes and ions(KFSI) 2024-2027
Additional
2026/05/18 Electron Beam Lithography in user mode!
Recently, the EBL System by Raith Nanofabrication was handed over into our use and responsibility after installation and users workshop!
10. 1. 2026: Vacuum in Particle Accelerators - book still available!